Sigh...it's so intermittent that it's becoming impossible to diagnose. Haven't really had issues in the last two days since I cleaned the MAF, but a couple of times I noticed the RPM dip slightly below 800 and then go up again. I could also be wrong, or just not paying attention, but I think I felt the car stumble just for moment a couple of times at highway speeds.
Maybe it really is the MAF and I just need a new one. I have a spare one from the junkyard, I'll slap it in and see what happens - it can either go worse, or it could be better. If it stays the same then I'll just have to look somewhere else.
CPS...hmmm...at 120k miles? I guess it wouldn't hurt to clean the connector.
The CPS would probably throw a code, but I've had an issue with my CPS and it only threw a code once. Never replaced it, but it does have intermittent starting issues and sometimes a rough idle.
Another thing to look at is the wire that leads from the CPS. There is a service bulletin that has you move the CPS wire away from the ignition coil wire. Interference from the ignition coil wire can throw off the signal from the CPS.